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Ultra pure water system for LCD panel industry

Ultra pure water system for LCD panel industry

In the entire production process of LCD panels, 80% of the processes require a large amount of ultrapure water, and as the size of LCD panels increases and display clarity improves, the requirements for ultrapure water quality are also increasing.

Typical ultra pure water process flow in the panel industry

 

The manufacturing process of LCD panels can be divided into three stages
1. The semiconductor process (array) in the early stage involves placing the thin film layer of the transistor on a glass substrate.
2. The middle section is the assembly process of liquid crystal filling, which combines the glass of the color filter with the glass of the transistor thin film layer, and fills the liquid crystal in the middle.
3. The latter part of the month is the panel module, which means adding a backlight board, iron components, and some IC parts behind the cell to become the so-called panel module.

 

Water standard for panel industry

Water quality indicators

DIW

UPW

Corresponding processing methods

Resistivity(MQ ·cm)

≥16.5MΩ-cm

≥18.0MQ ·cm

/

Particle((0.5μm)

≤50 ea/ml

≤10 ea/ml

MMF/MF/RO/UF

Bacteria

≤10 Col/100ml

≤5 Col/100ml

MF/UV/UF

TOC(mg/L)

≤50ppb

≤20ppb

ACF&UV(185nm)

Silica(mg/L)

≤20ppb

≤5ppb

RO/UF/IX

DO(mg/L)

≤50ppb

≤30ppb

MDG

Na(mg/L)

≤0.5ppb

≤0.1ppb

Cation lon Exchanger

K(mg/L)

≤0.5ppb

≤0.1ppb

Cation lon Exchanger

Ca(mg/L)

/

/

Cation lon Exchanger

CO3-2(mg/L)

/

/

Anion lon Exchanger

HCO3-(mg/L)

/

/

Anion lon Exchanger

Cl-(mg/L)

/

≤1.0ppb

ACF &Anion lon Exchanger

SO4-2(mg/L)

/

/